Veeco’s Confocal Metrology (VCM) Optical Profiler Systems provide a compact and easy-to-use non-contact metrology solution for applications requiring data acquisition from steep slopes, high surface roughness, or beneath transparent layers.

VCM Profiler Systems are based on spinning disc architecture and employ white light as the excitation source, enabling faster, more accurate and repeatable measurements than competing confocal systems.

Veeco's VCM series of confocal microscopes allow for 150, 200, or 300 millimetres of travel, and can be configured for either manual or automated operation. The VCM System software features a full complement of metrology and 3D imaging tools, and accommodates advanced research, development and industrial needs, from economical manual operation to high-throughput, fully automated sample positioning and data acquisition. An optional stitching interface makes stitching multiple data sets simple and automated, providing high-resolution imaging of features requiring a larger field of view. 
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